JPS4946670A - - Google Patents
Info
- Publication number
- JPS4946670A JPS4946670A JP48077815A JP7781573A JPS4946670A JP S4946670 A JPS4946670 A JP S4946670A JP 48077815 A JP48077815 A JP 48077815A JP 7781573 A JP7781573 A JP 7781573A JP S4946670 A JPS4946670 A JP S4946670A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2234381A DE2234381C3 (de) | 1972-07-10 | 1972-07-10 | Elektronenstrahl-Beleuchtungssystem |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4946670A true JPS4946670A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-04 |
| JPS5429075B2 JPS5429075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-09-20 |
Family
ID=5850513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7781573A Expired JPS5429075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-10 | 1973-07-10 |
Country Status (5)
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58147947A (ja) * | 1982-02-12 | 1983-09-02 | シ−メンス・アクチエンゲゼルシヤフト | 粒子線発生装置とその運転方法 |
| JPS58201240A (ja) * | 1982-05-10 | 1983-11-24 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 電子ビ−ム・ポテンシヤル切換装置 |
| JPS63166130A (ja) * | 1986-12-27 | 1988-07-09 | Jeol Ltd | 熱電界放射型電子源を有した電子線装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2527383A1 (fr) * | 1982-05-24 | 1983-11-25 | Univ Reims Champagne Ardenne | Canon a electrons avec cathode a emission de champ et lentille magnetique |
| GB2215907B (en) * | 1987-07-14 | 1992-04-15 | Jeol Ltd | Apparatus using a charged-particle beam |
| JP3998556B2 (ja) * | 2002-10-17 | 2007-10-31 | 株式会社東研 | 高分解能ｘ線顕微検査装置 |
| US7218703B2 (en) * | 2003-11-21 | 2007-05-15 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494972A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-04-26 | 1974-01-17 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1972
- 1972-07-10 DE DE2234381A patent/DE2234381C3/de not_active Expired
-
1973
- 1973-06-25 US US373415A patent/US3862419A/en not_active Expired - Lifetime
- 1973-07-04 NL NL7309348A patent/NL7309348A/xx not_active Application Discontinuation
- 1973-07-10 GB GB2986173A patent/GB1444098A/en not_active Expired
- 1973-07-10 JP JP7781573A patent/JPS5429075B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494972A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-04-26 | 1974-01-17 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58147947A (ja) * | 1982-02-12 | 1983-09-02 | シ−メンス・アクチエンゲゼルシヤフト | 粒子線発生装置とその運転方法 |
| JPS58201240A (ja) * | 1982-05-10 | 1983-11-24 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 電子ビ−ム・ポテンシヤル切換装置 |
| JPS63166130A (ja) * | 1986-12-27 | 1988-07-09 | Jeol Ltd | 熱電界放射型電子源を有した電子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2234381A1 (de) | 1974-01-31 |
| GB1444098A (en) | 1976-07-28 |
| NL7309348A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-01-14 |
| DE2234381B2 (de) | 1975-02-27 |
| DE2234381C3 (de) | 1975-10-16 |
| JPS5429075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-09-20 |
| US3862419A (en) | 1975-01-21 |