JPS4946428A - - Google Patents

Info

Publication number
JPS4946428A
JPS4946428A JP8932672A JP8932672A JPS4946428A JP S4946428 A JPS4946428 A JP S4946428A JP 8932672 A JP8932672 A JP 8932672A JP 8932672 A JP8932672 A JP 8932672A JP S4946428 A JPS4946428 A JP S4946428A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8932672A
Other versions
JPS515936B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8932672A priority Critical patent/JPS515936B2/ja
Priority to CA179,914A priority patent/CA993253A/en
Priority to NL7311904A priority patent/NL7311904A/xx
Priority to IT2857773A priority patent/IT995284B/it
Priority to GB4203373A priority patent/GB1449157A/en
Priority to FR7332172A priority patent/FR2198171A1/fr
Priority to DE19732345095 priority patent/DE2345095A1/de
Publication of JPS4946428A publication Critical patent/JPS4946428A/ja
Priority to US05/637,278 priority patent/US4063953A/en
Publication of JPS515936B2 publication Critical patent/JPS515936B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP8932672A 1972-09-06 1972-09-06 Expired JPS515936B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP8932672A JPS515936B2 (ja) 1972-09-06 1972-09-06
CA179,914A CA993253A (en) 1972-09-06 1973-08-29 Photosensitive composition
NL7311904A NL7311904A (ja) 1972-09-06 1973-08-30
IT2857773A IT995284B (it) 1972-09-06 1973-09-05 Composizione fotosensibile
GB4203373A GB1449157A (en) 1972-09-06 1973-09-06 Photosensitive composition
FR7332172A FR2198171A1 (ja) 1972-09-06 1973-09-06
DE19732345095 DE2345095A1 (de) 1972-09-06 1973-09-06 Fotoempfindliche masse
US05/637,278 US4063953A (en) 1972-09-06 1975-12-03 Photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8932672A JPS515936B2 (ja) 1972-09-06 1972-09-06

Publications (2)

Publication Number Publication Date
JPS4946428A true JPS4946428A (ja) 1974-05-04
JPS515936B2 JPS515936B2 (ja) 1976-02-24

Family

ID=13967532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8932672A Expired JPS515936B2 (ja) 1972-09-06 1972-09-06

Country Status (7)

Country Link
JP (1) JPS515936B2 (ja)
CA (1) CA993253A (ja)
DE (1) DE2345095A1 (ja)
FR (1) FR2198171A1 (ja)
GB (1) GB1449157A (ja)
IT (1) IT995284B (ja)
NL (1) NL7311904A (ja)

Also Published As

Publication number Publication date
IT995284B (it) 1975-11-10
FR2198171A1 (ja) 1974-03-29
CA993253A (en) 1976-07-20
DE2345095A1 (de) 1974-03-14
GB1449157A (en) 1976-09-15
NL7311904A (ja) 1974-03-08
JPS515936B2 (ja) 1976-02-24

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