JPS494549A - - Google Patents

Info

Publication number
JPS494549A
JPS494549A JP47041487A JP4148772A JPS494549A JP S494549 A JPS494549 A JP S494549A JP 47041487 A JP47041487 A JP 47041487A JP 4148772 A JP4148772 A JP 4148772A JP S494549 A JPS494549 A JP S494549A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47041487A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47041487A priority Critical patent/JPS494549A/ja
Publication of JPS494549A publication Critical patent/JPS494549A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47041487A 1972-04-24 1972-04-24 Pending JPS494549A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47041487A JPS494549A (cs) 1972-04-24 1972-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47041487A JPS494549A (cs) 1972-04-24 1972-04-24

Publications (1)

Publication Number Publication Date
JPS494549A true JPS494549A (cs) 1974-01-16

Family

ID=12609695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47041487A Pending JPS494549A (cs) 1972-04-24 1972-04-24

Country Status (1)

Country Link
JP (1) JPS494549A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5497439A (en) * 1978-01-18 1979-08-01 Tadashi Gotou Optical connecting device for optical system instrument
JPS6232615A (ja) * 1985-08-06 1987-02-12 Canon Inc 投影露光装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5497439A (en) * 1978-01-18 1979-08-01 Tadashi Gotou Optical connecting device for optical system instrument
JPS6232615A (ja) * 1985-08-06 1987-02-12 Canon Inc 投影露光装置

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