JPS4945035A - - Google Patents

Info

Publication number
JPS4945035A
JPS4945035A JP9058372A JP9058372A JPS4945035A JP S4945035 A JPS4945035 A JP S4945035A JP 9058372 A JP9058372 A JP 9058372A JP 9058372 A JP9058372 A JP 9058372A JP S4945035 A JPS4945035 A JP S4945035A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9058372A
Other languages
Japanese (ja)
Other versions
JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9058372A priority Critical patent/JPS5341142B2/ja
Publication of JPS4945035A publication Critical patent/JPS4945035A/ja
Publication of JPS5341142B2 publication Critical patent/JPS5341142B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP9058372A 1972-09-08 1972-09-08 Expired JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9058372A JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9058372A JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Publications (2)

Publication Number Publication Date
JPS4945035A true JPS4945035A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-27
JPS5341142B2 JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-31

Family

ID=14002451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9058372A Expired JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Country Status (1)

Country Link
JP (1) JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60156662A (ja) * 1984-01-25 1985-08-16 Eiwa Kasei Kogyo Kk Ｐ，ｐ′−オキシビス（ベンゼンスルホニルクロライド）の製造方法
US4554046A (en) * 1983-09-22 1985-11-19 Kabushiki Kaisha Toshiba Method of selectively etching high impurity concentration semiconductor layer
JPS62106631A (ja) * 1985-10-31 1987-05-18 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 選択性エツチング剤
US5266152A (en) * 1991-10-09 1993-11-30 Nissan Motor Co., Ltd. Method of etching
US5376214A (en) * 1992-09-22 1994-12-27 Nissan Motor Co., Ltd. Etching device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554046A (en) * 1983-09-22 1985-11-19 Kabushiki Kaisha Toshiba Method of selectively etching high impurity concentration semiconductor layer
JPS60156662A (ja) * 1984-01-25 1985-08-16 Eiwa Kasei Kogyo Kk Ｐ，ｐ′−オキシビス（ベンゼンスルホニルクロライド）の製造方法
JPS62106631A (ja) * 1985-10-31 1987-05-18 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 選択性エツチング剤
US5266152A (en) * 1991-10-09 1993-11-30 Nissan Motor Co., Ltd. Method of etching
US5376214A (en) * 1992-09-22 1994-12-27 Nissan Motor Co., Ltd. Etching device

Also Published As

Publication number Publication date
JPS5341142B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-31

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