JPS4943701A - - Google Patents
Info
- Publication number
- JPS4943701A JPS4943701A JP47086282A JP8628272A JPS4943701A JP S4943701 A JPS4943701 A JP S4943701A JP 47086282 A JP47086282 A JP 47086282A JP 8628272 A JP8628272 A JP 8628272A JP S4943701 A JPS4943701 A JP S4943701A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47086282A JPS5137563B2 (en:Method) | 1972-08-30 | 1972-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47086282A JPS5137563B2 (en:Method) | 1972-08-30 | 1972-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4943701A true JPS4943701A (en:Method) | 1974-04-24 |
| JPS5137563B2 JPS5137563B2 (en:Method) | 1976-10-16 |
Family
ID=13882460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47086282A Expired JPS5137563B2 (en:Method) | 1972-08-30 | 1972-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5137563B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118804A (en:Method) * | 1974-02-23 | 1975-09-17 |
-
1972
- 1972-08-30 JP JP47086282A patent/JPS5137563B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118804A (en:Method) * | 1974-02-23 | 1975-09-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5137563B2 (en:Method) | 1976-10-16 |