JPS4942858U - - Google Patents
Info
- Publication number
- JPS4942858U JPS4942858U JP8438272U JP8438272U JPS4942858U JP S4942858 U JPS4942858 U JP S4942858U JP 8438272 U JP8438272 U JP 8438272U JP 8438272 U JP8438272 U JP 8438272U JP S4942858 U JPS4942858 U JP S4942858U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8438272U JPS4942858U (en) | 1972-07-19 | 1972-07-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8438272U JPS4942858U (en) | 1972-07-19 | 1972-07-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4942858U true JPS4942858U (en) | 1974-04-15 |
Family
ID=27993407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8438272U Pending JPS4942858U (en) | 1972-07-19 | 1972-07-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4942858U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS522977U (en) * | 1975-06-23 | 1977-01-10 | ||
WO2002015243A1 (en) * | 2000-08-11 | 2002-02-21 | Tokyo Electron Limited | Device and method for processing substrate |
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1972
- 1972-07-19 JP JP8438272U patent/JPS4942858U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS522977U (en) * | 1975-06-23 | 1977-01-10 | ||
WO2002015243A1 (en) * | 2000-08-11 | 2002-02-21 | Tokyo Electron Limited | Device and method for processing substrate |