JPS4942659Y1 - - Google Patents
Info
- Publication number
- JPS4942659Y1 JPS4942659Y1 JP1926670U JP1926670U JPS4942659Y1 JP S4942659 Y1 JPS4942659 Y1 JP S4942659Y1 JP 1926670 U JP1926670 U JP 1926670U JP 1926670 U JP1926670 U JP 1926670U JP S4942659 Y1 JPS4942659 Y1 JP S4942659Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926670U JPS4942659Y1 (ja) | 1970-02-28 | 1970-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926670U JPS4942659Y1 (ja) | 1970-02-28 | 1970-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4942659Y1 true JPS4942659Y1 (ja) | 1974-11-21 |
Family
ID=33199582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1926670U Expired JPS4942659Y1 (ja) | 1970-02-28 | 1970-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4942659Y1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012219321A (ja) * | 2011-04-07 | 2012-11-12 | Ulvac Japan Ltd | 真空処理装置 |
-
1970
- 1970-02-28 JP JP1926670U patent/JPS4942659Y1/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012219321A (ja) * | 2011-04-07 | 2012-11-12 | Ulvac Japan Ltd | 真空処理装置 |