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Publication date
Application filedfiledCritical
Priority to JP47022925ApriorityCriticalpatent/JPS5149548B2/ja
Publication of JPS4942280ApublicationCriticalpatent/JPS4942280A/ja
Publication of JPS5149548B2publicationCriticalpatent/JPS5149548B2/ja
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
H01L2224/75—Apparatus for connecting with bump connectors or layer connectors