JPS4942155U - - Google Patents
Info
- Publication number
- JPS4942155U JPS4942155U JP4755872U JP4755872U JPS4942155U JP S4942155 U JPS4942155 U JP S4942155U JP 4755872 U JP4755872 U JP 4755872U JP 4755872 U JP4755872 U JP 4755872U JP S4942155 U JPS4942155 U JP S4942155U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4755872U JPS4942155U (ja) | 1972-04-24 | 1972-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4755872U JPS4942155U (ja) | 1972-04-24 | 1972-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4942155U true JPS4942155U (ja) | 1974-04-13 |
Family
ID=27924939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4755872U Pending JPS4942155U (ja) | 1972-04-24 | 1972-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4942155U (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003532794A (ja) * | 2000-05-08 | 2003-11-05 | インテマティックス コーポレーション | 材料チップのコンビナトリアル合成 |
WO2004027107A1 (ja) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | 成膜装置用マスキング機構 |
-
1972
- 1972-04-24 JP JP4755872U patent/JPS4942155U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003532794A (ja) * | 2000-05-08 | 2003-11-05 | インテマティックス コーポレーション | 材料チップのコンビナトリアル合成 |
WO2004027107A1 (ja) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | 成膜装置用マスキング機構 |
US9157144B2 (en) | 2002-09-20 | 2015-10-13 | Japan Science And Technology Agency | Masking mechanism for film forming apparatus |