JPS4940664A - - Google Patents
Info
- Publication number
- JPS4940664A JPS4940664A JP47084871A JP8487172A JPS4940664A JP S4940664 A JPS4940664 A JP S4940664A JP 47084871 A JP47084871 A JP 47084871A JP 8487172 A JP8487172 A JP 8487172A JP S4940664 A JPS4940664 A JP S4940664A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8487172A JPS551667B2 (en:Method) | 1972-08-24 | 1972-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8487172A JPS551667B2 (en:Method) | 1972-08-24 | 1972-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940664A true JPS4940664A (en:Method) | 1974-04-16 |
| JPS551667B2 JPS551667B2 (en:Method) | 1980-01-16 |
Family
ID=13842849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8487172A Expired JPS551667B2 (en:Method) | 1972-08-24 | 1972-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS551667B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161234A (ja) * | 1982-03-19 | 1983-09-24 | Jeol Ltd | 電界放出型荷電粒子発生装置 |
-
1972
- 1972-08-24 JP JP8487172A patent/JPS551667B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161234A (ja) * | 1982-03-19 | 1983-09-24 | Jeol Ltd | 電界放出型荷電粒子発生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS551667B2 (en:Method) | 1980-01-16 |