JPS4940482A - - Google Patents

Info

Publication number
JPS4940482A
JPS4940482A JP47083142A JP8314272A JPS4940482A JP S4940482 A JPS4940482 A JP S4940482A JP 47083142 A JP47083142 A JP 47083142A JP 8314272 A JP8314272 A JP 8314272A JP S4940482 A JPS4940482 A JP S4940482A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47083142A
Other languages
Japanese (ja)
Other versions
JPS57675B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8314272A priority Critical patent/JPS57675B2/ja
Publication of JPS4940482A publication Critical patent/JPS4940482A/ja
Publication of JPS57675B2 publication Critical patent/JPS57675B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP8314272A 1972-08-19 1972-08-19 Expired JPS57675B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8314272A JPS57675B2 (en:Method) 1972-08-19 1972-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8314272A JPS57675B2 (en:Method) 1972-08-19 1972-08-19

Publications (2)

Publication Number Publication Date
JPS4940482A true JPS4940482A (en:Method) 1974-04-16
JPS57675B2 JPS57675B2 (en:Method) 1982-01-07

Family

ID=13793946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8314272A Expired JPS57675B2 (en:Method) 1972-08-19 1972-08-19

Country Status (1)

Country Link
JP (1) JPS57675B2 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263805U (en:Method) * 1975-11-06 1977-05-11
JPS5319904U (en:Method) * 1976-07-29 1978-02-20
JPS62224048A (ja) * 1986-03-26 1987-10-02 Res Dev Corp Of Japan ダイヤモンド膜製半導体基板の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263805U (en:Method) * 1975-11-06 1977-05-11
JPS5319904U (en:Method) * 1976-07-29 1978-02-20
JPS62224048A (ja) * 1986-03-26 1987-10-02 Res Dev Corp Of Japan ダイヤモンド膜製半導体基板の製造方法

Also Published As

Publication number Publication date
JPS57675B2 (en:Method) 1982-01-07

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