JPS4940478A - - Google Patents
Info
- Publication number
- JPS4940478A JPS4940478A JP8303472A JP8303472A JPS4940478A JP S4940478 A JPS4940478 A JP S4940478A JP 8303472 A JP8303472 A JP 8303472A JP 8303472 A JP8303472 A JP 8303472A JP S4940478 A JPS4940478 A JP S4940478A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47083034A JPS5146579B2 (ko) | 1972-08-18 | 1972-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47083034A JPS5146579B2 (ko) | 1972-08-18 | 1972-08-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940478A true JPS4940478A (ko) | 1974-04-16 |
| JPS5146579B2 JPS5146579B2 (ko) | 1976-12-09 |
Family
ID=13790928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47083034A Expired JPS5146579B2 (ko) | 1972-08-18 | 1972-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146579B2 (ko) |
-
1972
- 1972-08-18 JP JP47083034A patent/JPS5146579B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5146579B2 (ko) | 1976-12-09 |