JPS4940285A - - Google Patents

Info

Publication number
JPS4940285A
JPS4940285A JP8498572A JP8498572A JPS4940285A JP S4940285 A JPS4940285 A JP S4940285A JP 8498572 A JP8498572 A JP 8498572A JP 8498572 A JP8498572 A JP 8498572A JP S4940285 A JPS4940285 A JP S4940285A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8498572A
Other languages
Japanese (ja)
Other versions
JPS516025B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8498572A priority Critical patent/JPS516025B2/ja
Publication of JPS4940285A publication Critical patent/JPS4940285A/ja
Publication of JPS516025B2 publication Critical patent/JPS516025B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Physical Vapour Deposition (AREA)
JP8498572A 1972-08-26 1972-08-26 Expired JPS516025B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8498572A JPS516025B2 (enrdf_load_stackoverflow) 1972-08-26 1972-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8498572A JPS516025B2 (enrdf_load_stackoverflow) 1972-08-26 1972-08-26

Publications (2)

Publication Number Publication Date
JPS4940285A true JPS4940285A (enrdf_load_stackoverflow) 1974-04-15
JPS516025B2 JPS516025B2 (enrdf_load_stackoverflow) 1976-02-24

Family

ID=13845900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8498572A Expired JPS516025B2 (enrdf_load_stackoverflow) 1972-08-26 1972-08-26

Country Status (1)

Country Link
JP (1) JPS516025B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53158635U (enrdf_load_stackoverflow) * 1977-05-20 1978-12-12
JPS57133926U (enrdf_load_stackoverflow) * 1981-02-12 1982-08-20

Also Published As

Publication number Publication date
JPS516025B2 (enrdf_load_stackoverflow) 1976-02-24

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