JPS4939651A - - Google Patents
Info
- Publication number
- JPS4939651A JPS4939651A JP47083390A JP8339072A JPS4939651A JP S4939651 A JPS4939651 A JP S4939651A JP 47083390 A JP47083390 A JP 47083390A JP 8339072 A JP8339072 A JP 8339072A JP S4939651 A JPS4939651 A JP S4939651A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47083390A JPS521413B2 (https=) | 1972-08-21 | 1972-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47083390A JPS521413B2 (https=) | 1972-08-21 | 1972-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4939651A true JPS4939651A (https=) | 1974-04-13 |
| JPS521413B2 JPS521413B2 (https=) | 1977-01-14 |
Family
ID=13801083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47083390A Expired JPS521413B2 (https=) | 1972-08-21 | 1972-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS521413B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10436508B2 (en) | 2013-02-26 | 2019-10-08 | Taiyo Nippon Sanso Corporation | Air separation method and air separation apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0337568U (https=) * | 1989-08-17 | 1991-04-11 |
-
1972
- 1972-08-21 JP JP47083390A patent/JPS521413B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10436508B2 (en) | 2013-02-26 | 2019-10-08 | Taiyo Nippon Sanso Corporation | Air separation method and air separation apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS521413B2 (https=) | 1977-01-14 |