JPS4939651A - - Google Patents

Info

Publication number
JPS4939651A
JPS4939651A JP47083390A JP8339072A JPS4939651A JP S4939651 A JPS4939651 A JP S4939651A JP 47083390 A JP47083390 A JP 47083390A JP 8339072 A JP8339072 A JP 8339072A JP S4939651 A JPS4939651 A JP S4939651A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47083390A
Other languages
Japanese (ja)
Other versions
JPS521413B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47083390A priority Critical patent/JPS521413B2/ja
Publication of JPS4939651A publication Critical patent/JPS4939651A/ja
Publication of JPS521413B2 publication Critical patent/JPS521413B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
JP47083390A 1972-08-21 1972-08-21 Expired JPS521413B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (cg-RX-API-DMAC10.html) 1972-08-21 1972-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (cg-RX-API-DMAC10.html) 1972-08-21 1972-08-21

Publications (2)

Publication Number Publication Date
JPS4939651A true JPS4939651A (cg-RX-API-DMAC10.html) 1974-04-13
JPS521413B2 JPS521413B2 (cg-RX-API-DMAC10.html) 1977-01-14

Family

ID=13801083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47083390A Expired JPS521413B2 (cg-RX-API-DMAC10.html) 1972-08-21 1972-08-21

Country Status (1)

Country Link
JP (1) JPS521413B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10436508B2 (en) 2013-02-26 2019-10-08 Taiyo Nippon Sanso Corporation Air separation method and air separation apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337568U (cg-RX-API-DMAC10.html) * 1989-08-17 1991-04-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10436508B2 (en) 2013-02-26 2019-10-08 Taiyo Nippon Sanso Corporation Air separation method and air separation apparatus

Also Published As

Publication number Publication date
JPS521413B2 (cg-RX-API-DMAC10.html) 1977-01-14

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