Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP47081599ApriorityCriticalpatent/JPS5232803B2/ja
Publication of JPS4939308ApublicationCriticalpatent/JPS4939308A/ja
Publication of JPS5232803B2publicationCriticalpatent/JPS5232803B2/ja
Semiconductor device and method of manufacturing the same apparatus and method for providing semiconductor devices having a field shield element between devices
Semiconductor device and method of manufacturing the same apparatus and method for providing semiconductor devices having a field shield element between devices