JPS4937881A - - Google Patents

Info

Publication number
JPS4937881A
JPS4937881A JP8077472A JP8077472A JPS4937881A JP S4937881 A JPS4937881 A JP S4937881A JP 8077472 A JP8077472 A JP 8077472A JP 8077472 A JP8077472 A JP 8077472A JP S4937881 A JPS4937881 A JP S4937881A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8077472A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8077472A priority Critical patent/JPS4937881A/ja
Publication of JPS4937881A publication Critical patent/JPS4937881A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8077472A 1972-08-14 1972-08-14 Pending JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8077472A JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-14 1972-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8077472A JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-14 1972-08-14

Publications (1)

Publication Number Publication Date
JPS4937881A true JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-08

Family

ID=13727759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8077472A Pending JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-14 1972-08-14

Country Status (1)

Country Link
JP (1) JPS4937881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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