JPS4937684U - - Google Patents

Info

Publication number
JPS4937684U
JPS4937684U JP8070272U JP8070272U JPS4937684U JP S4937684 U JPS4937684 U JP S4937684U JP 8070272 U JP8070272 U JP 8070272U JP 8070272 U JP8070272 U JP 8070272U JP S4937684 U JPS4937684 U JP S4937684U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8070272U
Other languages
Japanese (ja)
Other versions
JPS5212881Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8070272U priority Critical patent/JPS5212881Y2/ja
Publication of JPS4937684U publication Critical patent/JPS4937684U/ja
Application granted granted Critical
Publication of JPS5212881Y2 publication Critical patent/JPS5212881Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Control Of Velocity Or Acceleration (AREA)
  • Transmission Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8070272U 1972-07-08 1972-07-08 Expired JPS5212881Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8070272U JPS5212881Y2 (en:Method) 1972-07-08 1972-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8070272U JPS5212881Y2 (en:Method) 1972-07-08 1972-07-08

Publications (2)

Publication Number Publication Date
JPS4937684U true JPS4937684U (en:Method) 1974-04-03
JPS5212881Y2 JPS5212881Y2 (en:Method) 1977-03-23

Family

ID=27986693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8070272U Expired JPS5212881Y2 (en:Method) 1972-07-08 1972-07-08

Country Status (1)

Country Link
JP (1) JPS5212881Y2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179205U (en:Method) * 1975-11-06 1976-06-23
JPH02272610A (ja) * 1989-04-14 1990-11-07 Mitsubishi Electric Corp 位置決め装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179205U (en:Method) * 1975-11-06 1976-06-23
JPH02272610A (ja) * 1989-04-14 1990-11-07 Mitsubishi Electric Corp 位置決め装置

Also Published As

Publication number Publication date
JPS5212881Y2 (en:Method) 1977-03-23

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