JPS4936866U - - Google Patents
Info
- Publication number
- JPS4936866U JPS4936866U JP7893272U JP7893272U JPS4936866U JP S4936866 U JPS4936866 U JP S4936866U JP 7893272 U JP7893272 U JP 7893272U JP 7893272 U JP7893272 U JP 7893272U JP S4936866 U JPS4936866 U JP S4936866U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972078932U JPS5341430Y2 (ja) | 1972-07-04 | 1972-07-04 | |
| US303594A US3890564A (en) | 1972-07-04 | 1972-11-03 | Apparatus for inducing eddy current in a semiconductor wafer for measuring the electric conductivity or resistivity thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972078932U JPS5341430Y2 (ja) | 1972-07-04 | 1972-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4936866U true JPS4936866U (ja) | 1974-04-01 |
| JPS5341430Y2 JPS5341430Y2 (ja) | 1978-10-05 |
Family
ID=27983536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1972078932U Expired JPS5341430Y2 (ja) | 1972-07-04 | 1972-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5341430Y2 (ja) |
-
1972
- 1972-07-04 JP JP1972078932U patent/JPS5341430Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5341430Y2 (ja) | 1978-10-05 |