JPS4936291A - - Google Patents

Info

Publication number
JPS4936291A
JPS4936291A JP47077902A JP7790272A JPS4936291A JP S4936291 A JPS4936291 A JP S4936291A JP 47077902 A JP47077902 A JP 47077902A JP 7790272 A JP7790272 A JP 7790272A JP S4936291 A JPS4936291 A JP S4936291A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47077902A
Other languages
Japanese (ja)
Other versions
JPS5754946B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47077902A priority Critical patent/JPS5754946B2/ja
Priority to NLAANVRAGE7310667,A priority patent/NL179248C/xx
Publication of JPS4936291A publication Critical patent/JPS4936291A/ja
Publication of JPS5754946B2 publication Critical patent/JPS5754946B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67Complementary BJTs
    • H10D84/673Vertical complementary BJTs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP47077902A 1972-08-02 1972-08-02 Expired JPS5754946B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47077902A JPS5754946B2 (enrdf_load_stackoverflow) 1972-08-02 1972-08-02
NLAANVRAGE7310667,A NL179248C (nl) 1972-08-02 1973-08-01 Werkwijze voor het vervaardigen van een geintegreerde halfgeleiderschakeling met complementaire transistoren.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47077902A JPS5754946B2 (enrdf_load_stackoverflow) 1972-08-02 1972-08-02

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP557980A Division JPS55102263A (en) 1980-01-21 1980-01-21 Semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS4936291A true JPS4936291A (enrdf_load_stackoverflow) 1974-04-04
JPS5754946B2 JPS5754946B2 (enrdf_load_stackoverflow) 1982-11-20

Family

ID=13646991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47077902A Expired JPS5754946B2 (enrdf_load_stackoverflow) 1972-08-02 1972-08-02

Country Status (2)

Country Link
JP (1) JPS5754946B2 (enrdf_load_stackoverflow)
NL (1) NL179248C (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190286A (enrdf_load_stackoverflow) * 1975-02-05 1976-08-07
JPS55115066U (enrdf_load_stackoverflow) * 1979-02-06 1980-08-13
JPS56129338A (en) * 1980-03-14 1981-10-09 Nec Corp Semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119069U (enrdf_load_stackoverflow) * 1985-01-12 1986-07-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190286A (enrdf_load_stackoverflow) * 1975-02-05 1976-08-07
JPS55115066U (enrdf_load_stackoverflow) * 1979-02-06 1980-08-13
JPS56129338A (en) * 1980-03-14 1981-10-09 Nec Corp Semiconductor device

Also Published As

Publication number Publication date
NL179248B (nl) 1986-03-03
NL179248C (nl) 1986-08-01
JPS5754946B2 (enrdf_load_stackoverflow) 1982-11-20
NL7310667A (enrdf_load_stackoverflow) 1974-02-05

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