JPS493624A - - Google Patents
Info
- Publication number
- JPS493624A JPS493624A JP3988472A JP3988472A JPS493624A JP S493624 A JPS493624 A JP S493624A JP 3988472 A JP3988472 A JP 3988472A JP 3988472 A JP3988472 A JP 3988472A JP S493624 A JPS493624 A JP S493624A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3988472A JPS5146606B2 (de) | 1972-04-20 | 1972-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3988472A JPS5146606B2 (de) | 1972-04-20 | 1972-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS493624A true JPS493624A (de) | 1974-01-12 |
| JPS5146606B2 JPS5146606B2 (de) | 1976-12-10 |
Family
ID=12565390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3988472A Expired JPS5146606B2 (de) | 1972-04-20 | 1972-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146606B2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5487525A (en) * | 1977-12-30 | 1979-07-12 | Ibm | Resist construction |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6398848B2 (ja) * | 2014-12-08 | 2018-10-03 | 信越化学工業株式会社 | シュリンク材料及びパターン形成方法 |
-
1972
- 1972-04-20 JP JP3988472A patent/JPS5146606B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5487525A (en) * | 1977-12-30 | 1979-07-12 | Ibm | Resist construction |
| JPS5637540B2 (de) * | 1977-12-30 | 1981-09-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5146606B2 (de) | 1976-12-10 |