JPS493576A - - Google Patents

Info

Publication number
JPS493576A
JPS493576A JP47039874A JP3987472A JPS493576A JP S493576 A JPS493576 A JP S493576A JP 47039874 A JP47039874 A JP 47039874A JP 3987472 A JP3987472 A JP 3987472A JP S493576 A JPS493576 A JP S493576A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47039874A
Other languages
Japanese (ja)
Other versions
JPS5714023B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3987472A priority Critical patent/JPS5714023B2/ja
Publication of JPS493576A publication Critical patent/JPS493576A/ja
Publication of JPS5714023B2 publication Critical patent/JPS5714023B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3987472A 1972-04-19 1972-04-19 Expired JPS5714023B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3987472A JPS5714023B2 (en) 1972-04-19 1972-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3987472A JPS5714023B2 (en) 1972-04-19 1972-04-19

Publications (2)

Publication Number Publication Date
JPS493576A true JPS493576A (en) 1974-01-12
JPS5714023B2 JPS5714023B2 (en) 1982-03-20

Family

ID=12565115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3987472A Expired JPS5714023B2 (en) 1972-04-19 1972-04-19

Country Status (1)

Country Link
JP (1) JPS5714023B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52123647A (en) * 1976-04-09 1977-10-18 Ono Sokki Seisakusho Kk Displacement measuring device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2565514A (en) * 1947-12-01 1951-08-28 Int Standard Electric Corp Radiation intensity modulator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2565514A (en) * 1947-12-01 1951-08-28 Int Standard Electric Corp Radiation intensity modulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52123647A (en) * 1976-04-09 1977-10-18 Ono Sokki Seisakusho Kk Displacement measuring device
JPS6054603B2 (en) * 1976-04-09 1985-11-30 株式会社小野測器 distance measuring device

Also Published As

Publication number Publication date
JPS5714023B2 (en) 1982-03-20

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