JPS4934070A - - Google Patents
Info
- Publication number
- JPS4934070A JPS4934070A JP47075926A JP7592672A JPS4934070A JP S4934070 A JPS4934070 A JP S4934070A JP 47075926 A JP47075926 A JP 47075926A JP 7592672 A JP7592672 A JP 7592672A JP S4934070 A JPS4934070 A JP S4934070A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Particles Using Liquids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47075926A JPS4934070A (fi) | 1972-07-31 | 1972-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47075926A JPS4934070A (fi) | 1972-07-31 | 1972-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4934070A true JPS4934070A (fi) | 1974-03-29 |
Family
ID=13590368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47075926A Pending JPS4934070A (fi) | 1972-07-31 | 1972-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4934070A (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2018150979A1 (ja) * | 2017-02-15 | 2019-12-19 | 東京エレクトロン株式会社 | 気体処理装置および基板処理装置 |
-
1972
- 1972-07-31 JP JP47075926A patent/JPS4934070A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2018150979A1 (ja) * | 2017-02-15 | 2019-12-19 | 東京エレクトロン株式会社 | 気体処理装置および基板処理装置 |