JPS4933904A - - Google Patents

Info

Publication number
JPS4933904A
JPS4933904A JP7568672A JP7568672A JPS4933904A JP S4933904 A JPS4933904 A JP S4933904A JP 7568672 A JP7568672 A JP 7568672A JP 7568672 A JP7568672 A JP 7568672A JP S4933904 A JPS4933904 A JP S4933904A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7568672A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7568672A priority Critical patent/JPS4933904A/ja
Publication of JPS4933904A publication Critical patent/JPS4933904A/ja
Pending legal-status Critical Current

Links

JP7568672A 1972-07-27 1972-07-27 Pending JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7568672A JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-27 1972-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7568672A JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-27 1972-07-27

Publications (1)

Publication Number Publication Date
JPS4933904A true JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-28

Family

ID=13583310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7568672A Pending JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-27 1972-07-27

Country Status (1)

Country Link
JP (1) JPS4933904A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105762A (en) * 1975-03-14 1976-09-18 Nippon Electron Optics Lab Denshikenbikyotoniokeru shiryosochi
US7071475B2 (en) 1997-07-22 2006-07-04 Hitachi, Ltd. Method and apparatus for specimen fabrication

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105762A (en) * 1975-03-14 1976-09-18 Nippon Electron Optics Lab Denshikenbikyotoniokeru shiryosochi
US7071475B2 (en) 1997-07-22 2006-07-04 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7138628B2 (en) 1997-07-22 2006-11-21 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7176458B2 (en) 1997-07-22 2007-02-13 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7397052B2 (en) 1997-07-22 2008-07-08 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7397051B2 (en) 1997-07-22 2008-07-08 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7397050B2 (en) 1997-07-22 2008-07-08 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7525108B2 (en) 1997-07-22 2009-04-28 Hitachi, Ltd. Focused ion beam apparatus for specimen fabrication
US7791050B2 (en) 1997-07-22 2010-09-07 Hitachi, Ltd. Method and apparatus for specimen fabrication
US7999240B2 (en) 1997-07-22 2011-08-16 Hitachi, Ltd. Method and apparatus for specimen fabrication
US8405053B2 (en) 1997-07-22 2013-03-26 Hitachi, Ltd. Method and apparatus for specimen fabrication
US8569719B2 (en) 1997-07-22 2013-10-29 Hitachi, Ltd. Method and apparatus for specimen fabrication

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