JPS4933610A - - Google Patents

Info

Publication number
JPS4933610A
JPS4933610A JP47073937A JP7393772A JPS4933610A JP S4933610 A JPS4933610 A JP S4933610A JP 47073937 A JP47073937 A JP 47073937A JP 7393772 A JP7393772 A JP 7393772A JP S4933610 A JPS4933610 A JP S4933610A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47073937A
Other languages
Japanese (ja)
Other versions
JPS5225081B2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47073937A priority Critical patent/JPS5225081B2/ja
Publication of JPS4933610A publication Critical patent/JPS4933610A/ja
Publication of JPS5225081B2 publication Critical patent/JPS5225081B2/ja
Expired legal-status Critical Current

Links

JP47073937A 1972-07-24 1972-07-24 Expired JPS5225081B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47073937A JPS5225081B2 (xx) 1972-07-24 1972-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47073937A JPS5225081B2 (xx) 1972-07-24 1972-07-24

Publications (2)

Publication Number Publication Date
JPS4933610A true JPS4933610A (xx) 1974-03-28
JPS5225081B2 JPS5225081B2 (xx) 1977-07-05

Family

ID=13532516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47073937A Expired JPS5225081B2 (xx) 1972-07-24 1972-07-24

Country Status (1)

Country Link
JP (1) JPS5225081B2 (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285056U (xx) * 1975-12-20 1977-06-24

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9502238B2 (en) * 2015-04-03 2016-11-22 Lam Research Corporation Deposition of conformal films by atomic layer deposition and atomic layer etch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285056U (xx) * 1975-12-20 1977-06-24

Also Published As

Publication number Publication date
JPS5225081B2 (xx) 1977-07-05

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