JPS4933610A - - Google Patents
Info
- Publication number
- JPS4933610A JPS4933610A JP47073937A JP7393772A JPS4933610A JP S4933610 A JPS4933610 A JP S4933610A JP 47073937 A JP47073937 A JP 47073937A JP 7393772 A JP7393772 A JP 7393772A JP S4933610 A JPS4933610 A JP S4933610A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47073937A JPS5225081B2 (xx) | 1972-07-24 | 1972-07-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47073937A JPS5225081B2 (xx) | 1972-07-24 | 1972-07-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4933610A true JPS4933610A (xx) | 1974-03-28 |
JPS5225081B2 JPS5225081B2 (xx) | 1977-07-05 |
Family
ID=13532516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47073937A Expired JPS5225081B2 (xx) | 1972-07-24 | 1972-07-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225081B2 (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285056U (xx) * | 1975-12-20 | 1977-06-24 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9502238B2 (en) * | 2015-04-03 | 2016-11-22 | Lam Research Corporation | Deposition of conformal films by atomic layer deposition and atomic layer etch |
-
1972
- 1972-07-24 JP JP47073937A patent/JPS5225081B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285056U (xx) * | 1975-12-20 | 1977-06-24 |
Also Published As
Publication number | Publication date |
---|---|
JPS5225081B2 (xx) | 1977-07-05 |