JPS4933574A - - Google Patents

Info

Publication number
JPS4933574A
JPS4933574A JP7418272A JP7418272A JPS4933574A JP S4933574 A JPS4933574 A JP S4933574A JP 7418272 A JP7418272 A JP 7418272A JP 7418272 A JP7418272 A JP 7418272A JP S4933574 A JPS4933574 A JP S4933574A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7418272A
Other languages
Japanese (ja)
Other versions
JPS5516370B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7418272A priority Critical patent/JPS5516370B2/ja
Publication of JPS4933574A publication Critical patent/JPS4933574A/ja
Publication of JPS5516370B2 publication Critical patent/JPS5516370B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP7418272A 1972-07-26 1972-07-26 Expired JPS5516370B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7418272A JPS5516370B2 (enrdf_load_stackoverflow) 1972-07-26 1972-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7418272A JPS5516370B2 (enrdf_load_stackoverflow) 1972-07-26 1972-07-26

Publications (2)

Publication Number Publication Date
JPS4933574A true JPS4933574A (enrdf_load_stackoverflow) 1974-03-28
JPS5516370B2 JPS5516370B2 (enrdf_load_stackoverflow) 1980-05-01

Family

ID=13539758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7418272A Expired JPS5516370B2 (enrdf_load_stackoverflow) 1972-07-26 1972-07-26

Country Status (1)

Country Link
JP (1) JPS5516370B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191662A (enrdf_load_stackoverflow) * 1975-02-07 1976-08-11
JPS53124979A (en) * 1977-04-07 1978-10-31 Fujitsu Ltd Plasma etching method
JPS5493634A (en) * 1978-01-06 1979-07-24 Ulvac Corp Bombard cleaning method by plasma electron beam irraciation of hollow hot cathode
JPS58175832A (ja) * 1983-03-07 1983-10-15 Hitachi Ltd プラズマ処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191662A (enrdf_load_stackoverflow) * 1975-02-07 1976-08-11
JPS53124979A (en) * 1977-04-07 1978-10-31 Fujitsu Ltd Plasma etching method
JPS5493634A (en) * 1978-01-06 1979-07-24 Ulvac Corp Bombard cleaning method by plasma electron beam irraciation of hollow hot cathode
JPS58175832A (ja) * 1983-03-07 1983-10-15 Hitachi Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS5516370B2 (enrdf_load_stackoverflow) 1980-05-01

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