JPS4933155U - - Google Patents
Info
- Publication number
- JPS4933155U JPS4933155U JP7506372U JP7506372U JPS4933155U JP S4933155 U JPS4933155 U JP S4933155U JP 7506372 U JP7506372 U JP 7506372U JP 7506372 U JP7506372 U JP 7506372U JP S4933155 U JPS4933155 U JP S4933155U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972075063U JPS5119100Y2 (en:Method) | 1972-06-27 | 1972-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972075063U JPS5119100Y2 (en:Method) | 1972-06-27 | 1972-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4933155U true JPS4933155U (en:Method) | 1974-03-23 |
| JPS5119100Y2 JPS5119100Y2 (en:Method) | 1976-05-20 |
Family
ID=27976424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1972075063U Expired JPS5119100Y2 (en:Method) | 1972-06-27 | 1972-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5119100Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59100855U (ja) * | 1982-12-24 | 1984-07-07 | 株式会社島津製作所 | 連続スパツタ装置 |
-
1972
- 1972-06-27 JP JP1972075063U patent/JPS5119100Y2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1972US * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59100855U (ja) * | 1982-12-24 | 1984-07-07 | 株式会社島津製作所 | 連続スパツタ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5119100Y2 (en:Method) | 1976-05-20 |