JPS493225A - - Google Patents
Info
- Publication number
- JPS493225A JPS493225A JP4004672A JP4004672A JPS493225A JP S493225 A JPS493225 A JP S493225A JP 4004672 A JP4004672 A JP 4004672A JP 4004672 A JP4004672 A JP 4004672A JP S493225 A JPS493225 A JP S493225A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004672A JPS493225A (cs) | 1972-04-22 | 1972-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004672A JPS493225A (cs) | 1972-04-22 | 1972-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS493225A true JPS493225A (cs) | 1974-01-12 |
Family
ID=12569960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4004672A Pending JPS493225A (cs) | 1972-04-22 | 1972-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS493225A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6134955A (ja) * | 1984-07-26 | 1986-02-19 | Teikoku Seiki Kk | シリコンウエハ−の自動分離方法 |
-
1972
- 1972-04-22 JP JP4004672A patent/JPS493225A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6134955A (ja) * | 1984-07-26 | 1986-02-19 | Teikoku Seiki Kk | シリコンウエハ−の自動分離方法 |