JPS493160A - - Google Patents

Info

Publication number
JPS493160A
JPS493160A JP4134772A JP4134772A JPS493160A JP S493160 A JPS493160 A JP S493160A JP 4134772 A JP4134772 A JP 4134772A JP 4134772 A JP4134772 A JP 4134772A JP S493160 A JPS493160 A JP S493160A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4134772A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4134772A priority Critical patent/JPS493160A/ja
Publication of JPS493160A publication Critical patent/JPS493160A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP4134772A 1972-04-26 1972-04-26 Pending JPS493160A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4134772A JPS493160A (ja) 1972-04-26 1972-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4134772A JPS493160A (ja) 1972-04-26 1972-04-26

Publications (1)

Publication Number Publication Date
JPS493160A true JPS493160A (ja) 1974-01-11

Family

ID=12605969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4134772A Pending JPS493160A (ja) 1972-04-26 1972-04-26

Country Status (1)

Country Link
JP (1) JPS493160A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095561A (ja) * 1973-12-28 1975-07-30
JPS5156402A (en) * 1974-11-14 1976-05-18 Mitsui Toatsu Chemicals Shukamechiruno datsuchakuhoho
JPS5345456U (ja) * 1976-09-22 1978-04-18
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095561A (ja) * 1973-12-28 1975-07-30
JPS5156402A (en) * 1974-11-14 1976-05-18 Mitsui Toatsu Chemicals Shukamechiruno datsuchakuhoho
JPS5629843B2 (ja) * 1974-11-14 1981-07-10
JPS5345456U (ja) * 1976-09-22 1978-04-18
JPS563977Y2 (ja) * 1976-09-22 1981-01-28
JPH06208098A (ja) * 1993-09-20 1994-07-26 Shibaura Eng Works Co Ltd 基板洗浄装置

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