JPS493022A - - Google Patents
Info
- Publication number
- JPS493022A JPS493022A JP4398372A JP4398372A JPS493022A JP S493022 A JPS493022 A JP S493022A JP 4398372 A JP4398372 A JP 4398372A JP 4398372 A JP4398372 A JP 4398372A JP S493022 A JPS493022 A JP S493022A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4398372A JPS493022A (en) | 1972-05-01 | 1972-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4398372A JPS493022A (en) | 1972-05-01 | 1972-05-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS493022A true JPS493022A (en) | 1974-01-11 |
Family
ID=12678943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4398372A Pending JPS493022A (en) | 1972-05-01 | 1972-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS493022A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136030A (en) * | 1985-05-15 | 1987-06-19 | ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング | Polishing of silicon wafer |
| JPS6487147A (en) * | 1987-09-30 | 1989-03-31 | Nippon Mining Co | Polishing agent for chemical semiconductor |
-
1972
- 1972-05-01 JP JP4398372A patent/JPS493022A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62136030A (en) * | 1985-05-15 | 1987-06-19 | ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング | Polishing of silicon wafer |
| JPS6487147A (en) * | 1987-09-30 | 1989-03-31 | Nippon Mining Co | Polishing agent for chemical semiconductor |