JPS4929685A - - Google Patents
Info
- Publication number
- JPS4929685A JPS4929685A JP6867672A JP6867672A JPS4929685A JP S4929685 A JPS4929685 A JP S4929685A JP 6867672 A JP6867672 A JP 6867672A JP 6867672 A JP6867672 A JP 6867672A JP S4929685 A JPS4929685 A JP S4929685A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6867672A JPS5431712B2 (en:Method) | 1972-07-11 | 1972-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6867672A JPS5431712B2 (en:Method) | 1972-07-11 | 1972-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4929685A true JPS4929685A (en:Method) | 1974-03-16 |
| JPS5431712B2 JPS5431712B2 (en:Method) | 1979-10-09 |
Family
ID=13380542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6867672A Expired JPS5431712B2 (en:Method) | 1972-07-11 | 1972-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5431712B2 (en:Method) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370475A (en) * | 1976-12-03 | 1978-06-22 | Tdk Corp | Vibration detector |
| JPS5463818A (en) * | 1977-09-22 | 1979-05-23 | Hoechst Ag | Photosensitive copying composition |
| JPS58102934A (ja) * | 1981-12-11 | 1983-06-18 | デイスコビジヨン・アソシエイツ | フオトレジスト層を現像する方法 |
| US4407926A (en) * | 1980-11-21 | 1983-10-04 | Hoechst Aktiengesellschaft | Light-sensitive mixture comprising O-naphthoquinone-diazides and light sensitive copying material prepared therefrom |
| JPS60121445A (ja) * | 1983-12-06 | 1985-06-28 | Japan Synthetic Rubber Co Ltd | 集積回路作製用ポジ型感光性樹脂組成物 |
-
1972
- 1972-07-11 JP JP6867672A patent/JPS5431712B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370475A (en) * | 1976-12-03 | 1978-06-22 | Tdk Corp | Vibration detector |
| JPS5463818A (en) * | 1977-09-22 | 1979-05-23 | Hoechst Ag | Photosensitive copying composition |
| US4407926A (en) * | 1980-11-21 | 1983-10-04 | Hoechst Aktiengesellschaft | Light-sensitive mixture comprising O-naphthoquinone-diazides and light sensitive copying material prepared therefrom |
| JPS58102934A (ja) * | 1981-12-11 | 1983-06-18 | デイスコビジヨン・アソシエイツ | フオトレジスト層を現像する方法 |
| JPS60121445A (ja) * | 1983-12-06 | 1985-06-28 | Japan Synthetic Rubber Co Ltd | 集積回路作製用ポジ型感光性樹脂組成物 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5431712B2 (en:Method) | 1979-10-09 |