JPS4929089B1 - - Google Patents
Info
- Publication number
- JPS4929089B1 JPS4929089B1 JP45040630A JP4063070A JPS4929089B1 JP S4929089 B1 JPS4929089 B1 JP S4929089B1 JP 45040630 A JP45040630 A JP 45040630A JP 4063070 A JP4063070 A JP 4063070A JP S4929089 B1 JPS4929089 B1 JP S4929089B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45040630A JPS4929089B1 (US20050265960A1-20051201-C00007.png) | 1970-05-13 | 1970-05-13 | |
| GB1405671*[A GB1355252A (en) | 1970-05-13 | 1971-05-10 | Electron lenses of the magnetic field type |
| US00142606A US3736423A (en) | 1970-05-13 | 1971-05-12 | Electron lens of magnetic field type for an electron microscope and the like |
| DE19712123576 DE2123576B2 (de) | 1970-05-13 | 1971-05-12 | Magnetische elektronenlinse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45040630A JPS4929089B1 (US20050265960A1-20051201-C00007.png) | 1970-05-13 | 1970-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4929089B1 true JPS4929089B1 (US20050265960A1-20051201-C00007.png) | 1974-08-01 |
Family
ID=12585850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45040630A Pending JPS4929089B1 (US20050265960A1-20051201-C00007.png) | 1970-05-13 | 1970-05-13 |
Country Status (4)
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3984687A (en) * | 1975-03-17 | 1976-10-05 | International Business Machines Corporation | Shielded magnetic lens and deflection yoke structure for electron beam column |
| FR2413776A1 (fr) * | 1978-01-03 | 1979-07-27 | Thomson Csf | Objectif d'optique electronique |
| NL7804035A (nl) * | 1978-04-17 | 1979-10-19 | Philips Nv | Elektronenmikroskoop. |
| DE3010815C2 (de) * | 1980-03-20 | 1982-08-19 | Siemens AG, 1000 Berlin und 8000 München | Hochstrom-Elektronenquelle |
| EP2418672B1 (en) * | 2010-08-11 | 2013-03-20 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens |
| EP2827357A1 (en) | 2013-07-18 | 2015-01-21 | Fei Company | Magnetic lens for focusing a beam of charged particles |
| TWI744671B (zh) * | 2018-08-03 | 2021-11-01 | 日商紐富來科技股份有限公司 | 電子光學系統及多射束圖像取得裝置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3046397A (en) * | 1959-06-17 | 1962-07-24 | Tesla Np | Device for compensating axial astigmatism of electron-optical systems |
| US3150258A (en) * | 1962-07-05 | 1964-09-22 | Philips Electronic Pharma | Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments |
-
1970
- 1970-05-13 JP JP45040630A patent/JPS4929089B1/ja active Pending
-
1971
- 1971-05-10 GB GB1405671*[A patent/GB1355252A/en not_active Expired
- 1971-05-12 US US00142606A patent/US3736423A/en not_active Expired - Lifetime
- 1971-05-12 DE DE19712123576 patent/DE2123576B2/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2123576B2 (de) | 1976-10-07 |
| DE2123576A1 (de) | 1971-12-02 |
| GB1355252A (en) | 1974-06-05 |
| US3736423A (en) | 1973-05-29 |
