JPS4928584A - - Google Patents

Info

Publication number
JPS4928584A
JPS4928584A JP6998672A JP6998672A JPS4928584A JP S4928584 A JPS4928584 A JP S4928584A JP 6998672 A JP6998672 A JP 6998672A JP 6998672 A JP6998672 A JP 6998672A JP S4928584 A JPS4928584 A JP S4928584A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6998672A
Other languages
Japanese (ja)
Other versions
JPS5438594B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6998672A priority Critical patent/JPS5438594B2/ja
Publication of JPS4928584A publication Critical patent/JPS4928584A/ja
Publication of JPS5438594B2 publication Critical patent/JPS5438594B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6998672A 1972-07-14 1972-07-14 Expired JPS5438594B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6998672A JPS5438594B2 (en:Method) 1972-07-14 1972-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6998672A JPS5438594B2 (en:Method) 1972-07-14 1972-07-14

Publications (2)

Publication Number Publication Date
JPS4928584A true JPS4928584A (en:Method) 1974-03-14
JPS5438594B2 JPS5438594B2 (en:Method) 1979-11-21

Family

ID=13418488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6998672A Expired JPS5438594B2 (en:Method) 1972-07-14 1972-07-14

Country Status (1)

Country Link
JP (1) JPS5438594B2 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329739U (en:Method) * 1976-08-09 1978-03-14
JPS5348143U (en:Method) * 1976-09-28 1978-04-24
JPS5361414U (en:Method) * 1976-10-28 1978-05-25

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329739U (en:Method) * 1976-08-09 1978-03-14
JPS5348143U (en:Method) * 1976-09-28 1978-04-24
JPS5361414U (en:Method) * 1976-10-28 1978-05-25

Also Published As

Publication number Publication date
JPS5438594B2 (en:Method) 1979-11-21

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