JPS4928509A - - Google Patents

Info

Publication number
JPS4928509A
JPS4928509A JP6975072A JP6975072A JPS4928509A JP S4928509 A JPS4928509 A JP S4928509A JP 6975072 A JP6975072 A JP 6975072A JP 6975072 A JP6975072 A JP 6975072A JP S4928509 A JPS4928509 A JP S4928509A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6975072A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6975072A priority Critical patent/JPS4928509A/ja
Publication of JPS4928509A publication Critical patent/JPS4928509A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP6975072A 1972-07-12 1972-07-12 Pending JPS4928509A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6975072A JPS4928509A (zh) 1972-07-12 1972-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6975072A JPS4928509A (zh) 1972-07-12 1972-07-12

Publications (1)

Publication Number Publication Date
JPS4928509A true JPS4928509A (zh) 1974-03-14

Family

ID=13411774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6975072A Pending JPS4928509A (zh) 1972-07-12 1972-07-12

Country Status (1)

Country Link
JP (1) JPS4928509A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5281643U (zh) * 1975-12-13 1977-06-17
JPS5491407U (zh) * 1977-12-09 1979-06-28
JPS62259808A (ja) * 1986-05-06 1987-11-12 三菱電機株式会社 ウエハブレ−ク装置
JPS6310399U (zh) * 1986-07-09 1988-01-23
JP2016183784A (ja) * 2015-03-25 2016-10-20 三菱樹脂株式会社 連続焼鈍炉用炉床及び連続焼鈍炉

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5281643U (zh) * 1975-12-13 1977-06-17
JPS5526797Y2 (zh) * 1975-12-13 1980-06-26
JPS5491407U (zh) * 1977-12-09 1979-06-28
JPS62259808A (ja) * 1986-05-06 1987-11-12 三菱電機株式会社 ウエハブレ−ク装置
JPS6310399U (zh) * 1986-07-09 1988-01-23
JP2016183784A (ja) * 2015-03-25 2016-10-20 三菱樹脂株式会社 連続焼鈍炉用炉床及び連続焼鈍炉

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