JPS4928275A - - Google Patents
Info
- Publication number
- JPS4928275A JPS4928275A JP6815872A JP6815872A JPS4928275A JP S4928275 A JPS4928275 A JP S4928275A JP 6815872 A JP6815872 A JP 6815872A JP 6815872 A JP6815872 A JP 6815872A JP S4928275 A JPS4928275 A JP S4928275A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6815872A JPS5240954B2 (cs) | 1972-07-10 | 1972-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6815872A JPS5240954B2 (cs) | 1972-07-10 | 1972-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928275A true JPS4928275A (cs) | 1974-03-13 |
| JPS5240954B2 JPS5240954B2 (cs) | 1977-10-15 |
Family
ID=13365654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6815872A Expired JPS5240954B2 (cs) | 1972-07-10 | 1972-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240954B2 (cs) |
-
1972
- 1972-07-10 JP JP6815872A patent/JPS5240954B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240954B2 (cs) | 1977-10-15 |