JPS492787Y1 - - Google Patents
Info
- Publication number
- JPS492787Y1 JPS492787Y1 JP1697869U JP1697869U JPS492787Y1 JP S492787 Y1 JPS492787 Y1 JP S492787Y1 JP 1697869 U JP1697869 U JP 1697869U JP 1697869 U JP1697869 U JP 1697869U JP S492787 Y1 JPS492787 Y1 JP S492787Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697869U JPS492787Y1 (en) | 1969-02-25 | 1969-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697869U JPS492787Y1 (en) | 1969-02-25 | 1969-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS492787Y1 true JPS492787Y1 (en) | 1974-01-23 |
Family
ID=33198028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1697869U Expired JPS492787Y1 (en) | 1969-02-25 | 1969-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS492787Y1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4749713B2 (en) * | 2002-06-26 | 2011-08-17 | セムエキップ インコーポレイテッド | Ion implantation method and semiconductor manufacturing method by implantation of borohydride cluster ions |
-
1969
- 1969-02-25 JP JP1697869U patent/JPS492787Y1/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4749713B2 (en) * | 2002-06-26 | 2011-08-17 | セムエキップ インコーポレイテッド | Ion implantation method and semiconductor manufacturing method by implantation of borohydride cluster ions |