JPS4927707A - - Google Patents
Info
- Publication number
- JPS4927707A JPS4927707A JP6857872A JP6857872A JPS4927707A JP S4927707 A JPS4927707 A JP S4927707A JP 6857872 A JP6857872 A JP 6857872A JP 6857872 A JP6857872 A JP 6857872A JP S4927707 A JPS4927707 A JP S4927707A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47068578A JPS5025964B2 (OSRAM) | 1972-07-08 | 1972-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47068578A JPS5025964B2 (OSRAM) | 1972-07-08 | 1972-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4927707A true JPS4927707A (OSRAM) | 1974-03-12 |
| JPS5025964B2 JPS5025964B2 (OSRAM) | 1975-08-28 |
Family
ID=13377782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47068578A Expired JPS5025964B2 (OSRAM) | 1972-07-08 | 1972-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5025964B2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120069540A (ko) | 2010-11-17 | 2012-06-28 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 리소그래피용 펠리클 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4917912U (OSRAM) * | 1972-05-24 | 1974-02-15 |
-
1972
- 1972-07-08 JP JP47068578A patent/JPS5025964B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4917912U (OSRAM) * | 1972-05-24 | 1974-02-15 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120069540A (ko) | 2010-11-17 | 2012-06-28 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 리소그래피용 펠리클 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5025964B2 (OSRAM) | 1975-08-28 |