JPS4927489A - - Google Patents
Info
- Publication number
- JPS4927489A JPS4927489A JP6777572A JP6777572A JPS4927489A JP S4927489 A JPS4927489 A JP S4927489A JP 6777572 A JP6777572 A JP 6777572A JP 6777572 A JP6777572 A JP 6777572A JP S4927489 A JPS4927489 A JP S4927489A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6777572A JPS5144705B2 (en:Method) | 1972-07-06 | 1972-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6777572A JPS5144705B2 (en:Method) | 1972-07-06 | 1972-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4927489A true JPS4927489A (en:Method) | 1974-03-11 |
| JPS5144705B2 JPS5144705B2 (en:Method) | 1976-11-30 |
Family
ID=13354647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6777572A Expired JPS5144705B2 (en:Method) | 1972-07-06 | 1972-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5144705B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4989642A (en:Method) * | 1972-12-27 | 1974-08-27 | ||
| JPS5127825A (ja) * | 1974-09-02 | 1976-03-09 | Ulvac Corp | Himakukeiseisochi |
| JPS527820U (en:Method) * | 1975-07-02 | 1977-01-20 |
-
1972
- 1972-07-06 JP JP6777572A patent/JPS5144705B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4989642A (en:Method) * | 1972-12-27 | 1974-08-27 | ||
| JPS5127825A (ja) * | 1974-09-02 | 1976-03-09 | Ulvac Corp | Himakukeiseisochi |
| JPS527820U (en:Method) * | 1975-07-02 | 1977-01-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5144705B2 (en:Method) | 1976-11-30 |