JPS4927167A - - Google Patents
Info
- Publication number
- JPS4927167A JPS4927167A JP48035904A JP3590473A JPS4927167A JP S4927167 A JPS4927167 A JP S4927167A JP 48035904 A JP48035904 A JP 48035904A JP 3590473 A JP3590473 A JP 3590473A JP S4927167 A JPS4927167 A JP S4927167A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/3165—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation
- H01L21/31654—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself
- H01L21/3167—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself of anodic oxidation
- H01L21/31679—Inorganic layers composed of oxides or glassy oxides or oxide based glass formed by oxidation of semiconductor materials, e.g. the body itself of anodic oxidation of AIII BV compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02241—III-V semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Formation Of Insulating Films (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24887472A | 1972-05-01 | 1972-05-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4927167A true JPS4927167A (ja) | 1974-03-11 |
JPS5212057B2 JPS5212057B2 (ja) | 1977-04-04 |
Family
ID=22941055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48035904A Expired JPS5212057B2 (ja) | 1972-05-01 | 1973-03-30 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3776789A (ja) |
JP (1) | JPS5212057B2 (ja) |
CA (1) | CA980919A (ja) |
DE (1) | DE2319286C3 (ja) |
FR (1) | FR2182969B1 (ja) |
GB (1) | GB1371188A (ja) |
IT (1) | IT981200B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2413608C2 (de) * | 1974-03-21 | 1982-09-02 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum Herstellen eines Halbleiterbauelements |
FR2454183A1 (fr) * | 1979-04-10 | 1980-11-07 | Jerphagnon Jean | Structure de type oxyde-semi-conducteur dans laquelle le semi-conducteur est un compose iii-v et procede de fabrication de cette structure |
US7001827B2 (en) * | 2003-04-15 | 2006-02-21 | International Business Machines Corporation | Semiconductor wafer front side protection |
JP2006059535A (ja) * | 2004-08-17 | 2006-03-02 | Seiko Instruments Inc | 有機電子デバイスの製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3342652A (en) * | 1964-04-02 | 1967-09-19 | Ibm | Chemical polishing of a semi-conductor substrate |
CA920285A (en) * | 1970-11-30 | 1973-01-30 | L. Hartman Robert | Extending the operating life of light emitting p-n junction devices |
-
1972
- 1972-05-01 US US00248874A patent/US3776789A/en not_active Expired - Lifetime
-
1973
- 1973-03-08 IT IT21310/73A patent/IT981200B/it active
- 1973-03-30 FR FR7313777A patent/FR2182969B1/fr not_active Expired
- 1973-03-30 JP JP48035904A patent/JPS5212057B2/ja not_active Expired
- 1973-04-13 CA CA169,274A patent/CA980919A/en not_active Expired
- 1973-04-17 DE DE2319286A patent/DE2319286C3/de not_active Expired
- 1973-04-18 GB GB1859073A patent/GB1371188A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2319286B2 (de) | 1981-02-05 |
JPS5212057B2 (ja) | 1977-04-04 |
FR2182969A1 (ja) | 1973-12-14 |
CA980919A (en) | 1975-12-30 |
IT981200B (it) | 1974-10-10 |
US3776789A (en) | 1973-12-04 |
GB1371188A (en) | 1974-10-23 |
FR2182969B1 (ja) | 1977-04-29 |
DE2319286C3 (de) | 1981-12-24 |
DE2319286A1 (de) | 1973-11-22 |