JPS4926743B1 - - Google Patents
Info
- Publication number
- JPS4926743B1 JPS4926743B1 JP45101564A JP10156470A JPS4926743B1 JP S4926743 B1 JPS4926743 B1 JP S4926743B1 JP 45101564 A JP45101564 A JP 45101564A JP 10156470 A JP10156470 A JP 10156470A JP S4926743 B1 JPS4926743 B1 JP S4926743B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8461—Investigating impurities in semiconductor, e.g. Silicon
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US88500269A | 1969-12-15 | 1969-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4926743B1 true JPS4926743B1 (US20050192411A1-20050901-C00001.png) | 1974-07-11 |
Family
ID=25385915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45101564A Pending JPS4926743B1 (US20050192411A1-20050901-C00001.png) | 1969-12-15 | 1970-11-19 |
Country Status (6)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126255U (US20050192411A1-20050901-C00001.png) * | 1987-02-09 | 1988-08-17 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236817B2 (US20050192411A1-20050901-C00001.png) * | 1973-07-27 | 1977-09-19 | ||
| US4015127A (en) * | 1975-10-30 | 1977-03-29 | Aluminum Company Of America | Monitoring film parameters using polarimetry of optical radiation |
| US4218143A (en) * | 1979-01-22 | 1980-08-19 | The United States Of America As Represented By The Secretary Of The Navy | Lattice matching measurement device |
| JPS57132039A (en) * | 1981-02-09 | 1982-08-16 | Hitachi Ltd | Method for measuring carrier distribution |
| ATE20620T1 (de) * | 1982-04-10 | 1986-07-15 | Hell Rudolf Dr Ing Gmbh | Verfahren und vorrichtung zur dichtemessung von farbschichten noch feuchter druckfarbe. |
| US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
| JP2582363B2 (ja) * | 1987-03-19 | 1997-02-19 | 株式会社リコー | 多色現像装置の画像濃度検出機構 |
| US5007741A (en) * | 1989-09-25 | 1991-04-16 | At&T Bell Laboratories | Methods and apparatus for detecting impurities in semiconductors |
| US5287167A (en) * | 1990-07-31 | 1994-02-15 | Toshiba Ceramics Co., Ltd. | Method for measuring interstitial oxygen concentration |
| DE4211741B4 (de) * | 1991-04-05 | 2006-09-21 | Hahn-Meitner-Institut Berlin Gmbh | Spektroskopische Untersuchungsmethode für einen Stoff im Energiebereich geringer Absorption |
| DE19537807C1 (de) * | 1995-10-11 | 1997-02-06 | Roland Man Druckmasch | Verfahren zum Feststellen von Schichten |
| US5966019A (en) * | 1996-04-24 | 1999-10-12 | Boxer Cross, Inc. | System and method for measuring properties of a semiconductor substrate in a fabrication line |
| US9093335B2 (en) * | 2012-11-29 | 2015-07-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Calculating carrier concentrations in semiconductor Fins using probed resistance |
-
1969
- 1969-12-15 US US885002A patent/US3623818A/en not_active Expired - Lifetime
-
1970
- 1970-10-13 FR FR7037877A patent/FR2071789A5/fr not_active Expired
- 1970-11-19 JP JP45101564A patent/JPS4926743B1/ja active Pending
- 1970-12-03 GB GB5739370A patent/GB1306850A/en not_active Expired
- 1970-12-14 DE DE19702061420 patent/DE2061420A1/de active Pending
- 1970-12-14 CA CA100479A patent/CA924927A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126255U (US20050192411A1-20050901-C00001.png) * | 1987-02-09 | 1988-08-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2071789A5 (US20050192411A1-20050901-C00001.png) | 1971-09-17 |
| DE2061420A1 (de) | 1971-06-24 |
| CA924927A (en) | 1973-04-24 |
| GB1306850A (en) | 1973-02-14 |
| US3623818A (en) | 1971-11-30 |
