JPS4925951A - - Google Patents

Info

Publication number
JPS4925951A
JPS4925951A JP6535972A JP6535972A JPS4925951A JP S4925951 A JPS4925951 A JP S4925951A JP 6535972 A JP6535972 A JP 6535972A JP 6535972 A JP6535972 A JP 6535972A JP S4925951 A JPS4925951 A JP S4925951A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6535972A
Other languages
Japanese (ja)
Other versions
JPS5146719B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6535972A priority Critical patent/JPS5146719B2/ja
Priority to US372694A priority patent/US3869211A/en
Priority to DE2333326A priority patent/DE2333326C3/de
Publication of JPS4925951A publication Critical patent/JPS4925951A/ja
Publication of JPS5146719B2 publication Critical patent/JPS5146719B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
JP6535972A 1972-06-29 1972-06-29 Expired JPS5146719B2 (cs)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6535972A JPS5146719B2 (cs) 1972-06-29 1972-06-29
US372694A US3869211A (en) 1972-06-29 1973-06-22 Instrument for measuring thickness of thin film
DE2333326A DE2333326C3 (de) 1972-06-29 1973-06-29 Einrichtung zum Messen der Dicke eines auf einer Unterlage abgelagerten dünnen Films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6535972A JPS5146719B2 (cs) 1972-06-29 1972-06-29

Publications (2)

Publication Number Publication Date
JPS4925951A true JPS4925951A (cs) 1974-03-07
JPS5146719B2 JPS5146719B2 (cs) 1976-12-10

Family

ID=13284672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6535972A Expired JPS5146719B2 (cs) 1972-06-29 1972-06-29

Country Status (1)

Country Link
JP (1) JPS5146719B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5852475A (ja) * 1981-09-24 1983-03-28 Ulvac Corp 薄膜形成装置における薄膜監視測定方法およびその装置
JP2008504291A (ja) * 2004-06-24 2008-02-14 バーテックス　ファーマシューティカルズ　インコーポレイテッド Ａｔｐ結合カセットトランスポーターのモジュレーター
JP5189711B1 (ja) * 2012-02-15 2013-04-24 株式会社シンクロン 光学式膜厚計測装置及び光学式膜厚計測装置を用いた薄膜形成装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5852475A (ja) * 1981-09-24 1983-03-28 Ulvac Corp 薄膜形成装置における薄膜監視測定方法およびその装置
JP2008504291A (ja) * 2004-06-24 2008-02-14 バーテックス　ファーマシューティカルズ　インコーポレイテッド Ａｔｐ結合カセットトランスポーターのモジュレーター
JP2012062319A (ja) * 2004-06-24 2012-03-29 Vertex Pharmaceuticals Inc Ａｔｐ結合カセットトランスポーターのモジュレーター
JP2012107069A (ja) * 2004-06-24 2012-06-07 Vertex Pharmaceuticals Inc Ａｔｐ結合カセットトランスポーターのモジュレーター
JP2014156468A (ja) * 2004-06-24 2014-08-28 Vertex Pharmaceuticals Inc Ａｔｐ結合カセットトランスポーターのモジュレーター
JP5189711B1 (ja) * 2012-02-15 2013-04-24 株式会社シンクロン 光学式膜厚計測装置及び光学式膜厚計測装置を用いた薄膜形成装置

Also Published As

Publication number Publication date
JPS5146719B2 (cs) 1976-12-10

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