JPS4925938A - - Google Patents
Info
- Publication number
- JPS4925938A JPS4925938A JP47062714A JP6271472A JPS4925938A JP S4925938 A JPS4925938 A JP S4925938A JP 47062714 A JP47062714 A JP 47062714A JP 6271472 A JP6271472 A JP 6271472A JP S4925938 A JPS4925938 A JP S4925938A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fax Reproducing Arrangements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47062714A JPS5033866B2 (zh) | 1972-06-21 | 1972-06-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47062714A JPS5033866B2 (zh) | 1972-06-21 | 1972-06-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4925938A true JPS4925938A (zh) | 1974-03-07 |
JPS5033866B2 JPS5033866B2 (zh) | 1975-11-04 |
Family
ID=13208262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47062714A Expired JPS5033866B2 (zh) | 1972-06-21 | 1972-06-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5033866B2 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7649611B2 (en) | 2005-12-30 | 2010-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4873158A (zh) * | 1971-12-28 | 1973-10-02 |
-
1972
- 1972-06-21 JP JP47062714A patent/JPS5033866B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4873158A (zh) * | 1971-12-28 | 1973-10-02 |
Also Published As
Publication number | Publication date |
---|---|
JPS5033866B2 (zh) | 1975-11-04 |