JPS4925663A - - Google Patents

Info

Publication number
JPS4925663A
JPS4925663A JP6632772A JP6632772A JPS4925663A JP S4925663 A JPS4925663 A JP S4925663A JP 6632772 A JP6632772 A JP 6632772A JP 6632772 A JP6632772 A JP 6632772A JP S4925663 A JPS4925663 A JP S4925663A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6632772A
Other languages
Japanese (ja)
Other versions
JPS5249224B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6632772A priority Critical patent/JPS5249224B2/ja
Publication of JPS4925663A publication Critical patent/JPS4925663A/ja
Publication of JPS5249224B2 publication Critical patent/JPS5249224B2/ja
Expired legal-status Critical Current

Links

JP6632772A 1972-07-04 1972-07-04 Expired JPS5249224B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6632772A JPS5249224B2 (en) 1972-07-04 1972-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6632772A JPS5249224B2 (en) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
JPS4925663A true JPS4925663A (en) 1974-03-07
JPS5249224B2 JPS5249224B2 (en) 1977-12-15

Family

ID=13312619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6632772A Expired JPS5249224B2 (en) 1972-07-04 1972-07-04

Country Status (1)

Country Link
JP (1) JPS5249224B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011026096A (en) * 2009-07-28 2011-02-10 Murata Mfg Co Ltd Gas conveyance apparatus
JP6006393B1 (en) * 2015-10-09 2016-10-12 アルファ株式会社 Plasma processing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011026096A (en) * 2009-07-28 2011-02-10 Murata Mfg Co Ltd Gas conveyance apparatus
JP6006393B1 (en) * 2015-10-09 2016-10-12 アルファ株式会社 Plasma processing equipment
JP2017073365A (en) * 2015-10-09 2017-04-13 アルファ株式会社 Plasma processing device

Also Published As

Publication number Publication date
JPS5249224B2 (en) 1977-12-15

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