JPS492553A - - Google Patents

Info

Publication number
JPS492553A
JPS492553A JP47039830A JP3983072A JPS492553A JP S492553 A JPS492553 A JP S492553A JP 47039830 A JP47039830 A JP 47039830A JP 3983072 A JP3983072 A JP 3983072A JP S492553 A JPS492553 A JP S492553A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47039830A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47039830A priority Critical patent/JPS492553A/ja
Publication of JPS492553A publication Critical patent/JPS492553A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47039830A 1972-04-19 1972-04-19 Pending JPS492553A (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47039830A JPS492553A (US07943777-20110517-C00090.png) 1972-04-19 1972-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47039830A JPS492553A (US07943777-20110517-C00090.png) 1972-04-19 1972-04-19

Publications (1)

Publication Number Publication Date
JPS492553A true JPS492553A (US07943777-20110517-C00090.png) 1974-01-10

Family

ID=12563875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47039830A Pending JPS492553A (US07943777-20110517-C00090.png) 1972-04-19 1972-04-19

Country Status (1)

Country Link
JP (1) JPS492553A (US07943777-20110517-C00090.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211341A (en) * 1981-06-08 1982-12-25 Derubaato Perii Jiyunia Jiyon Method and apparatus for detecting weak vagina muscle
JPS58122729A (ja) * 1982-01-06 1983-07-21 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 整列装置
JPS61103149U (US07943777-20110517-C00090.png) * 1984-12-11 1986-07-01
JPS62248225A (ja) * 1986-04-21 1987-10-29 Canon Inc 投影露光装置
JPH04133414A (ja) * 1990-09-26 1992-05-07 Nec Yamaguchi Ltd 縮小投影露光装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211341A (en) * 1981-06-08 1982-12-25 Derubaato Perii Jiyunia Jiyon Method and apparatus for detecting weak vagina muscle
JPH0411209B2 (US07943777-20110517-C00090.png) * 1981-06-08 1992-02-27
JPS58122729A (ja) * 1982-01-06 1983-07-21 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 整列装置
JPS61103149U (US07943777-20110517-C00090.png) * 1984-12-11 1986-07-01
JPS62248225A (ja) * 1986-04-21 1987-10-29 Canon Inc 投影露光装置
JPH0618166B2 (ja) * 1986-04-21 1994-03-09 キヤノン株式会社 投影露光装置
JPH04133414A (ja) * 1990-09-26 1992-05-07 Nec Yamaguchi Ltd 縮小投影露光装置

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