JPS4923346A - - Google Patents

Info

Publication number
JPS4923346A
JPS4923346A JP6652572A JP6652572A JPS4923346A JP S4923346 A JPS4923346 A JP S4923346A JP 6652572 A JP6652572 A JP 6652572A JP 6652572 A JP6652572 A JP 6652572A JP S4923346 A JPS4923346 A JP S4923346A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6652572A
Other languages
Japanese (ja)
Other versions
JPS5033273B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6652572A priority Critical patent/JPS5033273B2/ja
Publication of JPS4923346A publication Critical patent/JPS4923346A/ja
Publication of JPS5033273B2 publication Critical patent/JPS5033273B2/ja
Expired legal-status Critical Current

Links

JP6652572A 1972-06-30 1972-06-30 Expired JPS5033273B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6652572A JPS5033273B2 (cs) 1972-06-30 1972-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6652572A JPS5033273B2 (cs) 1972-06-30 1972-06-30

Publications (2)

Publication Number Publication Date
JPS4923346A true JPS4923346A (cs) 1974-03-01
JPS5033273B2 JPS5033273B2 (cs) 1975-10-29

Family

ID=13318362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6652572A Expired JPS5033273B2 (cs) 1972-06-30 1972-06-30

Country Status (1)

Country Link
JP (1) JPS5033273B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249991A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Sputtering method
JPS52110181U (cs) * 1976-02-17 1977-08-22
JPS54178158U (cs) * 1978-06-06 1979-12-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249991A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Sputtering method
JPS52110181U (cs) * 1976-02-17 1977-08-22
JPS54178158U (cs) * 1978-06-06 1979-12-15

Also Published As

Publication number Publication date
JPS5033273B2 (cs) 1975-10-29

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