JPS4922861A - - Google Patents

Info

Publication number
JPS4922861A
JPS4922861A JP3590773A JP3590773A JPS4922861A JP S4922861 A JPS4922861 A JP S4922861A JP 3590773 A JP3590773 A JP 3590773A JP 3590773 A JP3590773 A JP 3590773A JP S4922861 A JPS4922861 A JP S4922861A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3590773A
Other languages
Japanese (ja)
Other versions
JPS5141547B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US247639A external-priority patent/US3915784A/en
Application filed filed Critical
Publication of JPS4922861A publication Critical patent/JPS4922861A/ja
Publication of JPS5141547B2 publication Critical patent/JPS5141547B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Dicing (AREA)
JP3590773A 1972-04-26 1973-03-30 Expired JPS5141547B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24753072A 1972-04-26 1972-04-26
US247639A US3915784A (en) 1972-04-26 1972-04-26 Method of semiconductor chip separation

Publications (2)

Publication Number Publication Date
JPS4922861A true JPS4922861A (enrdf_load_stackoverflow) 1974-02-28
JPS5141547B2 JPS5141547B2 (enrdf_load_stackoverflow) 1976-11-10

Family

ID=26938738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3590773A Expired JPS5141547B2 (enrdf_load_stackoverflow) 1972-04-26 1973-03-30

Country Status (1)

Country Link
JP (1) JPS5141547B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60213044A (ja) * 1984-04-06 1985-10-25 Nec Kansai Ltd 半導体装置の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155272U (enrdf_load_stackoverflow) * 1979-04-24 1980-11-08
JPS55162263U (enrdf_load_stackoverflow) * 1979-05-07 1980-11-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60213044A (ja) * 1984-04-06 1985-10-25 Nec Kansai Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5141547B2 (enrdf_load_stackoverflow) 1976-11-10

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