JPS4922144U - - Google Patents

Info

Publication number
JPS4922144U
JPS4922144U JP6406372U JP6406372U JPS4922144U JP S4922144 U JPS4922144 U JP S4922144U JP 6406372 U JP6406372 U JP 6406372U JP 6406372 U JP6406372 U JP 6406372U JP S4922144 U JPS4922144 U JP S4922144U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6406372U
Other languages
Japanese (ja)
Other versions
JPS5443082Y2 (ref
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6406372U priority Critical patent/JPS5443082Y2/ja
Publication of JPS4922144U publication Critical patent/JPS4922144U/ja
Application granted granted Critical
Publication of JPS5443082Y2 publication Critical patent/JPS5443082Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6406372U 1972-05-31 1972-05-31 Expired JPS5443082Y2 (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6406372U JPS5443082Y2 (ref) 1972-05-31 1972-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6406372U JPS5443082Y2 (ref) 1972-05-31 1972-05-31

Publications (2)

Publication Number Publication Date
JPS4922144U true JPS4922144U (ref) 1974-02-25
JPS5443082Y2 JPS5443082Y2 (ref) 1979-12-13

Family

ID=27955740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6406372U Expired JPS5443082Y2 (ref) 1972-05-31 1972-05-31

Country Status (1)

Country Link
JP (1) JPS5443082Y2 (ref)

Also Published As

Publication number Publication date
JPS5443082Y2 (ref) 1979-12-13

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