JPS4921066A - - Google Patents
Info
- Publication number
- JPS4921066A JPS4921066A JP5907072A JP5907072A JPS4921066A JP S4921066 A JPS4921066 A JP S4921066A JP 5907072 A JP5907072 A JP 5907072A JP 5907072 A JP5907072 A JP 5907072A JP S4921066 A JPS4921066 A JP S4921066A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5907072A JPS5148947B2 (en:Method) | 1972-06-15 | 1972-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5907072A JPS5148947B2 (en:Method) | 1972-06-15 | 1972-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4921066A true JPS4921066A (en:Method) | 1974-02-25 |
| JPS5148947B2 JPS5148947B2 (en:Method) | 1976-12-23 |
Family
ID=13102708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5907072A Expired JPS5148947B2 (en:Method) | 1972-06-15 | 1972-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5148947B2 (en:Method) |
-
1972
- 1972-06-15 JP JP5907072A patent/JPS5148947B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5148947B2 (en:Method) | 1976-12-23 |