JPS4918571A - - Google Patents

Info

Publication number
JPS4918571A
JPS4918571A JP5854972A JP5854972A JPS4918571A JP S4918571 A JPS4918571 A JP S4918571A JP 5854972 A JP5854972 A JP 5854972A JP 5854972 A JP5854972 A JP 5854972A JP S4918571 A JPS4918571 A JP S4918571A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5854972A
Other languages
Japanese (ja)
Other versions
JPS552736B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5854972A priority Critical patent/JPS552736B2/ja
Publication of JPS4918571A publication Critical patent/JPS4918571A/ja
Publication of JPS552736B2 publication Critical patent/JPS552736B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5854972A 1972-06-14 1972-06-14 Expired JPS552736B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5854972A JPS552736B2 (enrdf_load_stackoverflow) 1972-06-14 1972-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5854972A JPS552736B2 (enrdf_load_stackoverflow) 1972-06-14 1972-06-14

Publications (2)

Publication Number Publication Date
JPS4918571A true JPS4918571A (enrdf_load_stackoverflow) 1974-02-19
JPS552736B2 JPS552736B2 (enrdf_load_stackoverflow) 1980-01-22

Family

ID=13087525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5854972A Expired JPS552736B2 (enrdf_load_stackoverflow) 1972-06-14 1972-06-14

Country Status (1)

Country Link
JP (1) JPS552736B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846699A (ja) * 1981-09-14 1983-03-18 株式会社日立製作所 薄膜形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151614U (enrdf_load_stackoverflow) * 1979-04-19 1980-11-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846699A (ja) * 1981-09-14 1983-03-18 株式会社日立製作所 薄膜形成方法

Also Published As

Publication number Publication date
JPS552736B2 (enrdf_load_stackoverflow) 1980-01-22

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