JPS4918571A - - Google Patents
Info
- Publication number
- JPS4918571A JPS4918571A JP5854972A JP5854972A JPS4918571A JP S4918571 A JPS4918571 A JP S4918571A JP 5854972 A JP5854972 A JP 5854972A JP 5854972 A JP5854972 A JP 5854972A JP S4918571 A JPS4918571 A JP S4918571A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5854972A JPS552736B2 (en) | 1972-06-14 | 1972-06-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5854972A JPS552736B2 (en) | 1972-06-14 | 1972-06-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4918571A true JPS4918571A (en) | 1974-02-19 |
JPS552736B2 JPS552736B2 (en) | 1980-01-22 |
Family
ID=13087525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5854972A Expired JPS552736B2 (en) | 1972-06-14 | 1972-06-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS552736B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846699A (en) * | 1981-09-14 | 1983-03-18 | 株式会社日立製作所 | Method and device for forming thin film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55151614U (en) * | 1979-04-19 | 1980-11-01 |
-
1972
- 1972-06-14 JP JP5854972A patent/JPS552736B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846699A (en) * | 1981-09-14 | 1983-03-18 | 株式会社日立製作所 | Method and device for forming thin film |
JPS637479B2 (en) * | 1981-09-14 | 1988-02-17 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS552736B2 (en) | 1980-01-22 |