JPS4918571A - - Google Patents

Info

Publication number
JPS4918571A
JPS4918571A JP5854972A JP5854972A JPS4918571A JP S4918571 A JPS4918571 A JP S4918571A JP 5854972 A JP5854972 A JP 5854972A JP 5854972 A JP5854972 A JP 5854972A JP S4918571 A JPS4918571 A JP S4918571A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5854972A
Other languages
Japanese (ja)
Other versions
JPS552736B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5854972A priority Critical patent/JPS552736B2/ja
Publication of JPS4918571A publication Critical patent/JPS4918571A/ja
Publication of JPS552736B2 publication Critical patent/JPS552736B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP5854972A 1972-06-14 1972-06-14 Expired JPS552736B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5854972A JPS552736B2 (en) 1972-06-14 1972-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5854972A JPS552736B2 (en) 1972-06-14 1972-06-14

Publications (2)

Publication Number Publication Date
JPS4918571A true JPS4918571A (en) 1974-02-19
JPS552736B2 JPS552736B2 (en) 1980-01-22

Family

ID=13087525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5854972A Expired JPS552736B2 (en) 1972-06-14 1972-06-14

Country Status (1)

Country Link
JP (1) JPS552736B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846699A (en) * 1981-09-14 1983-03-18 株式会社日立製作所 Method and device for forming thin film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151614U (en) * 1979-04-19 1980-11-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846699A (en) * 1981-09-14 1983-03-18 株式会社日立製作所 Method and device for forming thin film
JPS637479B2 (en) * 1981-09-14 1988-02-17 Hitachi Ltd

Also Published As

Publication number Publication date
JPS552736B2 (en) 1980-01-22

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